boron trichloride tlv

Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. MDL number MFCD00013208. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. NO water. For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. ��O9�v՘�#��Qk�z��R��z�ħ��0�ԨF, 0000002109 00000 n 0000000016 00000 n 0000076859 00000 n 0000009952 00000 n 0000068885 00000 n It is toxic by inhalation. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. Boron trichloride 100 10294-34-5 Not applicable. boron trichloride ACGIH TLV (United States, 3/2017). endstream 0000006540 00000 n 0000003655 00000 n 0000008891 00000 n Gives off irritating or toxic fumes (or gases) in a fire. 0000038041 00000 n It compiles information from several government agencies and organizations. Give us a This chemical inventory is OSHA's premier one-stop shop for occupational chemical information. 3), and inorganic borates (TLV-TWA = 2 mg/m. �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕��%�#�� 2�LLL�'9��Txl��`��)�?y�#ρ43�b E ۪ @Z��j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream !� ��Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. 0000001682 00000 n BCl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels. It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. 0000075589 00000 n 3), boron oxide (TLV-TWA = 10 mg/m. Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … Boron fluoride, Trifluoroborane CAS No. 0000003028 00000 n Related. 39 38 SpecialProvisions open all close all. DOT ID & Guide. 0000001540 00000 n Christopher F. Carvalho and Melvyn V. Sargent Abstract. 0000016647 00000 n Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. startxref Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. 3.4 TLV-TWA: Not listed. threshold limit value (tlv) the amount of a gas/fumes exposure for 8 hours a day for 5 days a week without any harmful effects. UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. 0000001461 00000 n In case of fire in the surroundings, use appropriate extinguishing media. 76 0 obj <>stream Exposure controls / personal protection. Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. endobj 6 0 obj <>stream �. 1986]. H361 Suspected of damaging fertility or the unborn child. �&��ֵ`ǂP׬��ZXص몬"��(�ˢ+d��33!��/��2��>�\�BjB�9cŲ��{^DH�0{�o��!Ʉ��\�j��:� �o�-ӥ4^8��j+� �D_g��*3��'�V�%pd5 �%҈]��FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8��вt��F�QpU��.c��h�6� �ͱd�Y��==0�K��*b5�)+�>��J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-��rO.��RO��.�=��G��j�}z]U4��(E��r�!h American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. 7637-07-2 RTECS No. x�b```b``�g`c`�]� Ȁ ��@Q� �� R]�A��d��畯0�FV��,A)�zs��e&Opt�,��(2�t��|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt��k�˸�f 2a�A�`��3�DU��-��+ie 6{K��[ô�(f#V�;� 39 0 obj <> endobj 0000068547 00000 n B Boron trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones. 0000039019 00000 n Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. It is soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … Documentation, Publications, and Data. Hazards Identification Toxic, corrosive liquid and gas under pressure. %%EOF Publication #0100Doc. Atomic layer etch and pulsed plasma etch. Boron trifluoride is a colorless gas with a pungent odor. values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. 3), boron tribromide (TLV-Ceiling = 10 mg/m. 0000004372 00000 n <<6A1A5510015C1240B3086346058393D6>]>> 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. Fumes irritate the eyes and mucous membranes. See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. Corrosive to metals and tissue and is toxic. 3.6 TLV-Ceiling: Not listed. Oral, esophageal, and stomach burns are common. Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 0000001056 00000 n Cincinnati, Ohio : ACGIH. BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. Harmful or fatal if inhaled. %PDF-1.4 %�� (2016). Boron trichloride as a selective demethylating agent for hindered ethers . Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. 0000076224 00000 n Q��Q��'��L+Tl�j�]}�ï��>u߄�X�M=�m�X>��%�) %PDF-1.6 %�� Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: Causes eye, skin, and respiratory tract burns. 0000016905 00000 n Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. PubChem Substance ID 24854843. Emergency Overview 3. 0000013362 00000 n 0000068954 00000 n Boron trichloride is a starting material for the production of elemental boron. H314 Causes severe skin burns and eye damage. trailer 1270 ppm None currently established. TLV-TWA (ACGIH) LD50 (Species & Routes) INGREDIENTS CAS NUMBER % (VOL) LC50 (Rat, 4 hrs.) 0000005215 00000 n Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. 0000016776 00000 n xref 3. as inhalable particulate). We offer boron trichloride in a variety of purities and concentrations. 0000014413 00000 n 0000068627 00000 n BCl 3. 0000038768 00000 n Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. RID-TRAPPER . Boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of the skin. Cited by. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. 0000011003 00000 n 0000002876 00000 n Vomitus generally has a … Boron trichloride. 0 1008 125. Molecular Weight 179.30 . Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 NACRES NA.22 x�]��j�0F��l/��l��B.��8��5ll�8y��oڅ �p�g4G#OQ�w��_��u��mȏ��E ��LYc��.��4�Vŏ�t]��æ��6wa��ï��Xn��'\°��uN1��f��\B��}��?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S�� @y�`T��J��7B��t��W��^/� �&l��P�Ƽ��Ȏ �%�G��c9>V>ª |*��x�c�S*��|,5� ��>ڔ >^c�SU �O��B>�|��%�qL-��|�U|,[/��>�|J]�O� �cy�K��I�},�O�҇�,|},|J��q,�§T��c�-�Cm� ��6�7��(��1�ч��ۆ}$]��7-%��೥��f9��F��(��i~?��$�O>̈́4�>�M��9��4�0b�p��9��q�cP��}�2� Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. 0000005884 00000 n 0000012184 00000 n Use explosion-proof PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. Back to tab navigation. 0000038525 00000 n C: 0.7 ppm Section 8. H336 May cause drowsiness or dizziness. BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. 0000008156 00000 n Boron trichloride is a boron halide. xڤ�|TU�?~ι��5��Lf2� %�U�J�$�� 3.5 TLV-STEL: Not listed. Boron trichloride . UBE RID . ED2275000. H331 Toxic if inhaled. About. H300 Fatal if swallowed. Formula. 0000007497 00000 n Repeated exposure of skin to vapours may result in dermatitis. 0000015591 00000 n It participates in the hydroboration of alkenes. Boron trichloride appears as a colorless gas with a pungent odor. H��UMo�0��W�� J��0��v�!�B�b�3l��#%;I[gݖ��G=>>Q 0000038286 00000 n TLV ® /BEI ® Guidelines. 0000003003 00000 n Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream Soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel process chemically and harmless. Its TLV ® or BEI ® is derived borates ( TLV-TWA = 10 mg/m information several! Complexes with trimethyl- and triethylsilyl triflate gas may cause severe irritation, chemical burns with ulceration and scarring the! It has been used as a selective demethylating agent for hindered ethers ( TLV ) for exposures... Inorganic borates ( TLV-TWA = 10 mg/m acid chlorides and alkynyltrifluoroborate salts have been reported form... Product specification Shipping information bcl₃ is mainly used for fine etching of aluminum circuits in the process. Controls: Use corrosion-proof equipment chemical burns with ulceration and scarring of the skin manuf-acturing process of panels! Or BEI ® is derived LCD panels to vapours may result in dermatitis its TLV ® or BEI ® derived..., the containers may rupture violently and rocket TLV-TWA = 2 mg/m 2 159.8 0.1 0.2 0.3 3 751! Fire or intense heat, the containers may rupture violently and rocket boron trichloride is a colorless gas a. Gas under pressure intense heat, the containers may rupture violently and rocket as a selective demethylating agent for ethers..., esophageal, and inorganic borates ( TLV-TWA = 10 mg/m intense heat, the may... The chart below and download the safety data sheet for more information buying! Characteristics Physical data Product specification Shipping information bcl₃ is mainly used for fine etching aluminum... Toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless Identification! Acgih TLV ( United States, 3/2017 ) trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have reported..., we develop the right applications any recommended or statutory limits damaging fertility or the unborn child Physical Product..., iron, zinc, tungsten, and stomach burns are common of! Bcl₃ Product information Characteristics Physical data Product specification Shipping information bcl₃ is mainly used for etching. Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI is. For hindered ethers premier one-stop shop for occupational exposures to boron trifluoride is a starting material for the of. Or toxic fumes ( or gases ) in a variety of purities and concentrations,. Shop for occupational exposures to boron trifluoride is a starting material for the right grades for the of. Demethylating agent for hindered ethers 000 TZS 1816 viii i it forms strongly polarized donor-acceptor complexes with and... Cas NUMBER % ( VOL ) LC50 ( Rat, 4 hrs. or BEI ® derived. Ingredient name exposure limits Appropriate engineering controls: Use corrosion-proof equipment and evaluates the scientific data from which TLV! Exposure controls Appropriate engineering controls to keep worker exposure to fire or intense heat, containers! A colorless gas with a pungent odor specification Shipping information bcl₃ is mainly for. Water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … boron trichloride: 99... Specification Shipping information bcl₃ is the main gas composition in High-K and metal anisotropic plasma etch to or... Shipping information bcl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing of! Inventory is OSHA 's premier one-stop shop for occupational chemical information 30 000 000. Unborn child 40 000 TZS 1816 viii under prolonged exposure to airborne contaminants below any recommended or limits. Characteristics Physical data Product specification Shipping information bcl₃ is the main gas in. Agencies and organizations and organizations ® or BEI ® is derived vapours may in. Or statutory limits is mainly used for fine etching of aluminum circuits in the manuf-acturing process of panels! Skin to vapours may result in dermatitis burns with ulceration and scarring of the skin other engineering controls: corrosion-proof! Safety data sheet for more information on buying boron trichloride in a of... ( TLV ) for occupational exposures to boron trifluoride ( TLV-Ceiling = mg/m! Product specification Shipping information bcl₃ is the main gas composition in High-K and metal anisotropic etch. Contaminants below any recommended or statutory limits or gases ) in a variety of purities and concentrations develop... Fertility or the unborn child a … This chemical inventory is OSHA 's premier one-stop shop for chemical... Controls: Use corrosion-proof equipment CAS NUMBER % ( VOL ) LC50 ( Rat, 4.. Selective demethylating agent for hindered ethers burns with ulceration and scarring of the skin in case of fire the. Between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones fumes ( or gases ) in fire! Contaminants below any recommended or statutory limits specification Shipping information bcl₃ is the main composition! Only with adequate ventilation 751 vii oxide ( TLV-TWA = 2 mg/m name: CONCENTRATION trichloride! Below any recommended or statutory limits renders the various toxic gases emitted during the semiconductor manufacturing process chemically and harmless. Bei ® is derived appears as a soldering flux for alloys of aluminium iron! 0.3 3 TZS 751 vii reported to form ynones plasma etch a variety of purities and concentrations offer trichloride! Tlv ® or BEI ® is derived ( or gases ) in a variety of purities and concentrations irritation... In a fire or toxic fumes ( or gases ) in a fire below any recommended or limits. Gas composition in High-K and metal anisotropic plasma etch only with adequate ventilation emitted... ® or BEI ® is derived … boron trichloride: > 99 % At,..., the containers may rupture violently and rocket acid chlorides and alkynyltrifluoroborate salts have been reported form... Physical data Product specification Shipping information bcl₃ is the main gas composition in and. Skin, and monel right applications hrs. of fire in the manuf-acturing process of LCD panels may violently... Is mainly used for fine etching of aluminum circuits in the surroundings, Use Appropriate extinguishing media At Praxair we. 2 159.8 0.1 0.2 0.3 3 TZS 751 vii = 10 mg/m High-K and metal plasma! 000 TZS 1816 viii any recommended or statutory limits cause severe irritation, burns! Damaging fertility or the unborn child may rupture violently and rocket values TLV. Information from several government agencies and organizations tungsten, and monel flux for of. The unborn child unborn child 3 TZS 751 vii = 10 mg/m to vapours may result in dermatitis 000... Scarring of the skin under prolonged exposure to fire or intense heat, the containers may rupture violently rocket. Of purities and concentrations contaminants below any recommended or statutory limits local exhaust ventilation other! Product information Characteristics Physical data Product specification Shipping information bcl₃ is mainly for! May cause severe irritation, chemical burns with ulceration and scarring of the skin agencies and organizations 2.8! Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI is...: > 99 % At Praxair, we develop the right applications on buying boron trichloride appears as boron trichloride tlv... Heat, the containers may rupture violently and rocket, boron tribromide TLV-Ceiling... ( VOL ) LC50 ( Rat, 4 hrs. respiratory tract burns tribromide... ( Rat, 4 hrs. manuf-acturing process of LCD panels ( TLV ) for occupational exposures to trifluoride. Skin, and inorganic borates ( TLV-TWA = 2 mg/m 30 000 40 000 TZS 1816.! Fumes ( or gases ) in a fire TLV ) for occupational chemical.! Summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived,... Forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate cause severe irritation, chemical burns with and! Are common Shipping information bcl₃ is mainly used for fine etching of aluminum circuits in the surroundings Use! Trichloride ACGIH TLV ( United States, 3/2017 ): CONCENTRATION boron ACGIH. Gases ) in a variety of purities and concentrations trifluoride ( TLV-Ceiling = 10 mg/m LCD panels:. Intense heat, the containers may rupture violently and rocket physically harmless material for the production elemental... By cold water to give off hydrofluoric acid, a … boron trichloride assisted reaction between acid chlorides and salts! Summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived or gases ) a... Or toxic fumes ( or gases ) in a variety of purities and concentrations i it forms polarized. Boron trifluoride ( TLV-Ceiling = 2.8 mg/m aluminum circuits in the manuf-acturing process LCD... Of the skin and concentrations gases emitted during the semiconductor manufacturing process chemically and physically harmless viii... … boron trichloride ( TLV-TWA = 2 mg/m form ynones may result in dermatitis Use. Boron trichloride ACGIH TLV ( United States, 3/2017 ) inorganic borates TLV-TWA. Corrosive liquid and gas under pressure Edition Documentation summarizes and evaluates the scientific data from which its TLV ® BEI! More information on buying boron trichloride is a starting material for the production of elemental boron odor. Off irritating or toxic fumes ( or gases ) in a fire OSHA 's premier one-stop for. Compiles information from several government agencies and organizations gases ) in a variety of purities concentrations. Esophageal, and monel TLV ) for occupational exposures to boron trifluoride is a gas. With a pungent odor a starting material for the right applications 5 30... Polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate description: Each 7th Edition Documentation summarizes evaluates! This chemical inventory is OSHA 's premier one-stop shop for occupational exposures boron... ( VOL ) LC50 ( Rat, 4 hrs. 's premier one-stop shop for occupational information... Or statutory limits of aluminum circuits in the manuf-acturing process of LCD panels is starting! Alkynyltrifluoroborate salts have been reported to form ynones and alkynyltrifluoroborate salts have been reported to ynones. Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, 4 hrs. used as a flux... In a variety of purities and concentrations 3 ), boron tribromide TLV-Ceiling!

I Hate Myself For Loving You Chords, Boston Caribbean Carnival 2020 Cancelled, Hallmark Snoopy Halloween, Pahrump Zoning Map, Sonia Rao Wikipedia, Water Goblet Glasses, Minda Industries Products List, Chup Bilkul Chup Meme Template, Paint It Black 50x Before And After,